기기공지사항

Type : Fully manual (Mask Aligner)
Mask size : up to 5" x 5"
Substrate size : piece to 4" dia
UV lamp & Power : 350W & power supply
Uniform beam size : 4.25" x 4.25"
Beam Uniformity : <±3%
Beam wavelength : 350 ~ 450nm
365nm Intensity : ~30mW/cm2
Alignment accuracy : 1um
Process resolution : 1um@1um PR thickness with vacuum contact
Process mode : Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving : x,y,z & θ